Design, modeling and characterization of stable, high Q-factor curved Fabry-Pérot cavities

Abstract : In this paper, we introduce a novel design for high performance silicon-based Fabry-Pérot cavities and their corresponding design model. According to the design model, the new design shows higher stability, lower insertion loss and higher quality factor Q. Our methodology was based, on one hand, on taking advantage of light reflection and refraction over curved surfaces with curvatures along 2 orthogonal directions, in order to confine the Gaussian beam inside the cavity, thus reducing loss due to beam divergence. Such design enables approaching new limits, where Q-factor is mainly governed by the mirrors reflectance. On the other hand, the use of Bragg reflectors, obtained by DRIE etching enables reaching reflectances above 99%, thus enabling very high Q-factors.
Type de document :
Article dans une revue
Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.543-552
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https://hal-upec-upem.archives-ouvertes.fr/hal-00909507
Contributeur : Shermila Mostarshedi <>
Soumis le : mardi 26 novembre 2013 - 13:08:17
Dernière modification le : jeudi 24 mai 2018 - 15:58:08

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  • HAL Id : hal-00909507, version 1

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Maurine Malak, Nicolas Pavy, F. Marty, Elodie Richalot, Ai-Qun Liu, et al.. Design, modeling and characterization of stable, high Q-factor curved Fabry-Pérot cavities. Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.543-552. 〈hal-00909507〉

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