Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor

M. Malak 1 N. Pavy 1 F. Marty 1 Y. -A. Peter A. Q. Liu Tarik Bourouina 1
1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
Abstract : We demonstrate experimentally optical quality factor of nearly 9000 in a micromachined Fabry-Perot resonator based on free space propagation of light and direct coupling to optical fibers. This result is obtained on long cavity resonators (L>250 mu m), a usually difficult case in terms of power loss, but very useful configuration for experiments requiring either long optical path or enough space for manipulation. The resonator architecture includes two multilayered silicon-air Bragg mirrors of cylindrical shape, combined with a fiber rod lens. The specific stability criteria are derived for the proposed resonator architecture. Dimensions of the fabricated devices are chosen accordingly. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3595277]
Type de document :
Article dans une revue
Applied Physics Letters, American Institute of Physics, 2011, 98 (21), 〈10.1063/1.3595277〉
Liste complète des métadonnées
https://hal-upec-upem.archives-ouvertes.fr/hal-00692912
Contributeur : Admin Esycom <>
Soumis le : mardi 1 mai 2012 - 17:13:42
Dernière modification le : jeudi 7 février 2019 - 16:55:24

Identifiants

Collections

UNIV-MLV | ESYCOM | CV_ESYCOM | UPEC-UPEM | ESIEE-PARIS | UNIV-HESAM

Citation

M. Malak, N. Pavy, F. Marty, Y. -A. Peter, A. Q. Liu, et al.. Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor. Applied Physics Letters, American Institute of Physics, 2011, 98 (21), 〈10.1063/1.3595277〉. 〈hal-00692912〉

Exporter

BibTeX TEI DC DCterms EndNote

Partager

Métriques

Consultations de la notice

93

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD