M. Malak, N. Pavy, F. Marty, Y. -A. Peter, A. Q. Liu, et al.. Micromachined Fabry-Perot resonator combining submillimeter cavity length and high quality factor.
Applied Physics Letters, American Institute of Physics, 2011, 98 (21),
⟨10.1063/1.3595277⟩.
⟨hal-00692912⟩