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On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching

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https://hal-upec-upem.archives-ouvertes.fr/hal-01721058
Contributor : Yamin Leprince Connect in order to contact the contributor
Submitted on : Wednesday, May 25, 2022 - 10:53:40 AM
Last modification on : Friday, June 24, 2022 - 1:52:30 PM

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K. N. Nguyen, Philippe Basset, F. Marty, Yamin Leprince-Wang, Tarik Bourouina. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, American Institute of Physics, 2013, 113 (19), ⟨10.1063/1.4805024⟩. ⟨hal-01721058⟩

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