On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching

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https://hal-upec-upem.archives-ouvertes.fr/hal-01721058
Contributor : Yamin Leprince <>
Submitted on : Thursday, March 1, 2018 - 4:44:56 PM
Last modification on : Thursday, February 7, 2019 - 3:51:14 PM

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Yamin Leprince, K. Nguyen, Philippe Basset, F. Marty, Y. Leprince-Wang, et al.. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, American Institute of Physics, 2013, 113 (19), ⟨10.1063/1.4805024⟩. ⟨hal-01721058⟩

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