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On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching

K. N. Nguyen 1 Philippe Basset 1 F. Marty 2 Yamin Leprince-Wang Tarik Bourouina 1 
1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 IEF - Institut d'électronique fondamentale
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https://hal-upec-upem.archives-ouvertes.fr/hal-01721058
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Submitted on : Wednesday, May 25, 2022 - 10:53:40 AM
Last modification on : Friday, June 24, 2022 - 1:52:30 PM

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UPEC-UPEM | CNRS | CNAM | ESYCOM | ESIEE-PARIS | UNIV-HESAM

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K. N. Nguyen, Philippe Basset, F. Marty, Yamin Leprince-Wang, Tarik Bourouina. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, American Institute of Physics, 2013, 113 (19), ⟨10.1063/1.4805024⟩. ⟨hal-01721058⟩

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