On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching

K. N. Nguyen (1) , Philippe Basset (1) , F. Marty (2) , Yamin Leprince-Wang , Tarik Bourouina (1)

1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 IEF - Institut d'électronique fondamentale

Domaines: Science des matériaux [cond-mat.mtrl-sci]

K. N. Nguyen, Philippe Basset, F. Marty, Yamin Leprince-Wang, Tarik Bourouina. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching. Journal of Applied Physics, 2013, 113 (19), ⟨10.1063/1.4805024⟩. ⟨hal-01721058⟩