Service interruption on Monday 11 July from 12:30 to 13:00: all the sites of the CCSD (HAL, EpiSciences, SciencesConf, AureHAL) will be inaccessible (network hardware connection).
Skip to Main content Skip to Navigation
Journal articles

Study of black silicon obtained by cryogenic plasma etching : Approach to achieve the hot spot of a thermoelectric energy harvester

Abstract : n this paper, we study the enhanced absorption properties of micro/nano structured silicon surface under incident electromagnetic illumination and its capacity to convert light into heat. We simulate the optical reflectance of three-dimensional micro/nano silicon cones of different dimensions and under different electric field incident angles. According to the favorable simulation results, we fabri- cate black silicon with conical microstructures that exhibits excellent anti-reflectivity behavior. Plasma etching under cryogenic temperatures is used for this purpose in an induc- tively coupled plasma-reactive ion etching reactor. The reflectance of the black silicon is measured to be approxi- mately 1 % in the optical wavelength range, by using an integrating sphere coupled to a calibrated spectrometer. Fur- thermore, a device integrating a resistance temperature detector in a black silicon area is developed in order to investigate its efficiency as a photo-thermal converter
Document type :
Journal articles
Complete list of metadata

https://hal-upec-upem.archives-ouvertes.fr/hal-00909502
Contributor : Shermila Mostarshedi Connect in order to contact the contributor
Submitted on : Tuesday, November 26, 2013 - 12:53:48 PM
Last modification on : Monday, February 21, 2022 - 3:38:10 PM

Identifiers

  • HAL Id : hal-00909502, version 1

Citation

K.N. Nguyen, David Abi Saab, Philippe Basset, Elodie Richalot, Maurine Malak, et al.. Study of black silicon obtained by cryogenic plasma etching : Approach to achieve the hot spot of a thermoelectric energy harvester. Microsystem Technologies, Springer Verlag, 2013, 18 (11), pp.1807-1814. ⟨hal-00909502⟩

Share

Metrics

Record views

88