Determination of complex permittivity and thickness of a single-layer material using reflection ellipsometry at several angles of incidence

Abstract : An analytic formulation is proposed to obtain both complex permittivity and thickness of a single-layer material from reflection ellipsometry data obtained at more than two angles of incidence. The principle consists in decoupling the equations that involve both thickness and complex permittivity. The solution is based on multi-steps numerical processing methods. (C) 2002 Wiley Periodicals, Inc.