Determination of complex permittivity and thickness of a single-layer material using reflection ellipsometry at several angles of incidence

Abstract : An analytic formulation is proposed to obtain both complex permittivity and thickness of a single-layer material from reflection ellipsometry data obtained at more than two angles of incidence. The principle consists in decoupling the equations that involve both thickness and complex permittivity. The solution is based on multi-steps numerical processing methods. (C) 2002 Wiley Periodicals, Inc.
Document type :
Journal articles
Liste complète des métadonnées

https://hal-upec-upem.archives-ouvertes.fr/hal-00693607
Contributor : Admin Esycom <>
Submitted on : Wednesday, May 2, 2012 - 6:46:14 PM
Last modification on : Thursday, February 7, 2019 - 5:04:20 PM

Links full text

Identifiers

Citation

F. Sagnard. Determination of complex permittivity and thickness of a single-layer material using reflection ellipsometry at several angles of incidence. Microwave and Optical Technology Letters, Wiley, 2002, 35 (2), pp.154--157. ⟨10.1002/mop.10544⟩. ⟨hal-00693607⟩

Share

Metrics

Record views

74