A new design for rotational, tunable wideband RF MEMS capacitors

Abstract : Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.
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Julien Pagazani, Pierre Nicole, Lionel Rousseau, Frederic Marty, Gaelle Lissorgues. A new design for rotational, tunable wideband RF MEMS capacitors. Microsystem Technologies, Springer Verlag, 2011, 17 (4), pp.513--522. ⟨10.1007/s00542-011-1226-x⟩. ⟨hal-00692913⟩

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