In situ measurements of the complex permittivity of materials using reflection ellipsometry in the microwave band: experiments (Part II)

Florence Sagnard (1) , F. Bentabet , Christophe Vignat (2)

1 IETR - Institut d'Électronique et des Technologies du numéRique
2 LIGM - Laboratoire d'Informatique Gaspard-Monge

The aim of this series of two papers is to propose a new experimental tool based on the reflection ellipsometry technique for in situ characterization of single-layer dielectric materials at microwave frequencies. In the first part of this paper, the theoretical part of the technique and the associated multistep numerical algorithm used to estimate the complex permittivity of a sample have been presented. In this second part, we focus on the experimental setup and on the results. We report the estimated values of the complex permittivity for several types of materials and compare them with results obtained by the Fresnel method. We show that measured values agree with those currently published.

Mots clés: Complex permittivity; Fresnel coefficients; ellipsometry; free-space methods; material characterization; microwave frequencies; polarization; reflexion

Florence Sagnard, F. Bentabet, Christophe Vignat. In situ measurements of the complex permittivity of materials using reflection ellipsometry in the microwave band: experiments (Part II). IEEE Transactions on Instrumentation and Measurement, 2005, 54 (3), pp.1274-1282. ⟨10.1109/TIM.2005.847199⟩. ⟨hal-00772989⟩